Center of Nanoelectronics and Novel Materials & Laboratory of Nanophotonics

Publication details
Name:	Carbon depth distribution in spin-on silicon dioxide films
Journal:	Thin Solid films
Detail info:	Vol. 261, № 1–2. – P. 186–191
Year:	1995
Authors:	N. V. Gaponenko, H. Gnaser, P. Becker, V. A. Grozhik.